Table of Contents

Recent Changes in the Semiconductor Industry. 1 Deposition Technologies and Applications: Introduction and Overview. 2 Silicon Epitaxy by Chemical Vapor Deposition. 3 Chemical Vapor Deposition of Silicon Dioxide Films. 4 Metal Organic Chemical Vapor Deposition: Technology and Equipment. 5 Feature Scale Modeling. 6 The Role of Metrology and Inspection In Semiconductor Processing. 7 Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing. 8 Sputtering and Sputter Deposition. 9 Laser and Electron Beam Assisted Processing. 10 Molecular Beam Epitaxy: Equipment and Practice. 11 Ion Beam Deposition. 12 Chemical Mechanical Polishing. 13 Organic Dielectrics in Multilevel Metalization of Integrated Circuits. 14 Performance, Processing, and Lithography Trends. Index

About the Author

Former Assistant Professor in Materials Science at the University of Arizona with extensive professional experience as a technologist at both IBM and Intel Corporations. Dr. Seshan passed away in 2017.