Table of Contents

Principles of MEMS and MOEMS.- Laser Technology in Micromanufacturing.- Soft Geometrical Error Compensation Methods Using Laser Interferometer.- Characterising Etching Processes in Bulk Micromachining.- Features of Surface Micromachining and Wafer Bonding Process.- Micromanufacturing for Document Security: Optically Variable Devices.- Nanofinishing Techniques.- Micro and Nanotechnology Applications for Space Micropropulsion.- Carbon Nanotube Production and Applications: Basis of Nanotechnology.- Carbon based Nanostructures.- Molecular Logic Gates.- Nanomechanical Cantilever Devices for Biological Sensors.- Micro Energy and Chemical Systems (MECS) and Multiscale Fabrication.- Sculptured Thin Films.- e-Beam Nanolithography Integrated with Nanoassembly: Precision Chemical Engineering.- Nanolithography in the Evanescent Near Field.- Nanotechnology for Fuel Cell Applications.- Derivatisation of Carbon Nanotubes with Amines: A Solvent-free Technique.- Chemical Crosslinking in C60 Thin Films.