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Optical Metrology for Precision Engineering


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Table of Contents

Table of Contents Chapter 1 Fundamentals of Precision Metrology Chapter 2 Measurement of Length Chapter 3 Measurement of Angle Chapter 4 Measurement of Time Chapter 5 Measurement of dimensions Chapter 5 Measurement of Straightness and Flatness Chapter 6 Measurement of roundness and cylindricity Chapter 7 Measurement squareness Chapter 8 Measurement of surface roughness Chapter 9 Measurement of microstructures Chapter 10 Measurement of internal structures Chapter 11 Measurement of displacement Chapter 12 Measurement of velocity Chapter 13 Measurement of acceleration Chapter 14 Measurement uncertainty References

About the Author

Wei Gao and Yuki Shimizu, Tohoku University, Japan.

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