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Plasma Surface Modification and Plasma Polymerization


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Table of Contents

Introduction Plasma Plasma State - Dissociation Energy - Energy for Ionization: Energy Transfer by Particle Collision, Energy Transfer by Photon Absorption - Cross Section of Collision - Properties of Plasma: Debye Length and Debye Shielding, Electron Temperature and Ion Temperature, Velocity Distribution Function - Plasma Generation - References Interactions between Plasma and Polymeric Materials Etching Reactions - Implantation Reactions - Radical Generation - Polymer Deposition - Polymer Deposition and Ablation - References Plasma Graft Copolymerization Radicals Created by Plasma - Plasma Graft Polymerization - Plasma Graft Polymerization and Photoinitiated Graft Polymerization - References Surface Modification by Implantation History of Implantation Process as Surface Modification - Chemistry of CASING Process - Mechanism of Implantation - Implantation by Remote Plasma - Hydrophilic Surface Modification by Implantation of Oxygen Functionalities - Hydrophilic Surface Modification by Implantation of Chlorine Functionalities - Hydrophobic Surface Modification by Implantation of Fluorine Functionalities - Implantation and Degradation - References Plasma Polymerization History of Plasma Polymerization - Plasma Polymerization Mechanism - Operational Parameters of Plasma Polymerization - Chemical Structure of Plasma Polymers - Design for Formation of Functional Plasma Polymers - References Features and Functionalities of Plasma Polymers Mechanical Properties of Plasma Polymers - Electrical Properties of Plasma Polymers - Chemical Sensor Devices Composed of Plasma Polymer Films: Humidity Sensor Devices, Sensing Mechanism of Gas Sensor Devices, Gas Sensor Devices Formed from Plasma Polymer Films - Permeation Properties through Plasma Polymer Films: Permeation Process, Membranes for Separation of Oxygen and Nitrogen, Membranes for Permeation of Water Vapor, Membranes for Separation of Ethanol and Water (Pervaporation Membranes) - Plasma Polymer Films Containing Cation or Anion Groups - Hydrophilic and Hydrophobic Plasma Polymer Films: Surface Energy of Polymers, Hydrophilic Plasma Polymer Films, Hydrophobic Plasma Polymer Films - Hard Coating by Plasma Polymer Films: SiOx Films from Plasma Polymerization of Alkoxysilanes, SiOx Films from Plasma Polymerization of Tetramethylsilane/Oxygen Mixtures - References Index More Than 200 Tables and Schematics The 66 tables provide extensive reference data in convenient form. The 152 figures include schematics which illustrate reactions and processes. Here is a small sampling of this material. Tables: - Plasmas and interactions between plasma and polymeric materials - Oxygen functionalities created at the surface of polyethylene films by plasmas - Surface energy for polyethylene films exposed to radical and plasma source - Elemental composition of polypropylene films treated with CCI4 plasma - Degradation of polymers - Electrical conductivity of typical plasma polymers - Permeability characteristics of plasma polymers formed from silicone compounds Schematics: - Coupling systems for plasma generation - Transformation reactions of oxygen functional groups - Overall reactions of plasma polymerization - Direct irradiation method - Radical formation from polystyrene by plasma irradiation - Essential reactions in photo-induced graft polymerization - Degradation behavior - Rate constant of plasma polymerization - Comparison in polymerization rate among acetylene, ethylene, and ethane - Reaction steps in plasma polymerization - Domain of plasma polymer deposition - Energy diagram for adsorption of molecules at the surface of n-type semiconductors - Reactor for plasma polymerization

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