Table of Contents

1. Introduction.- 1.1. Evolution of the Scanning Electron Microscope.- 1.2. Evolution of the Electron Probe Microanalyzer.- 1.3. Outline of This Book.- 2. Electron Optics.- 2.1. How the SEM Works.- 2.2. Electron Guns.- 2.3. Electron Lenses.- 2.4. Electron Probe Diameter versus Electron Probe Current.- 2.5. Summary of SEM Microscopy Modes.- 3. Electron-Specimen Interactions.- 3.1. Introduction.- 3.2. Electron Scattering.- 3.3. Interaction Volume.- 3.4. Signals from Elastic Scattering.- 3.5. Signals from Inelastic Scattering.- 3.6. Summary.- 4. Image Formation and Interpretation.- 4.1. Introduction.- 4.2. The Basic SEM Imaging Process.- 4.3. Detectors.- 4.4. Image Contrast at Low Magnification (100,000x).- 4.7. Image Processing for the Display of Contrast Information.- 4.8. Defects of the SEM Imaging Process.- 4.9. Special Topics in SEM Imaging.- 4.10. Developing a Comprehensive Imaging Strategy.- 5. X-Ray Spectral Measurement: WDS and EDS.- 5.1. Introduction.- 5.2. Wavelength-Dispersive Spectrometer.- 5.3. Energy-Dispersive X-Ray Spectrometer.- 5.4. Comparison of WDS and EDS.- Appendix: Initial Detector Setup and Testing.- 6. Qualitative X-Ray Analysis.- 6.1. Introduction.- 6.2. EDS Qualitative Analysis.- 6.3. WDS Qualitative Analysis.- 6.4. Automatic Qualitative EDS Analysis.- 7. X-Ray Peak and Background Measurements.- 7.1. General Considerations for X-Ray Data Handling.- 7.2. Background Correction.- 7.3. Peak Overlap Correction.- 8. Quantitative X-Ray Analysis: The Basics.- 8.1. Introduction.- 8.2. Advantages of Quantitative X-Ray Microanalysis in the SEM/EPMA.- 8.3. Quantitative Analysis Procedures.- 8.4. The Approach to X-Ray Quantitation: The Need for Matrix Corrections.- 8.5. The Physical Origin of Matrix Effects.- 8.6. X-Ray Production.- 8.7. ZAF Factors in Microanalysis.- 8.8. Types of Matrix Correction Schemes.- 8.9. Caveats.- 9. Quantitative X-Ray Analysis: Theory and Practice.- 9.1. Introduction.- 9.2. ZAF Technique.- 9.3. ø; (?z) Technique.- 9.8. Special Sample Analysis.- 9.9. Precision and Sensitivity in X-Ray Analysis.- 9.10. Light-Element Analysis.- Appendix 9.1. Equations for the ?, ?, ?, and ø(0) Terms of the Packwood-Brown ø (?z) Equation.- Appendix 9.2. Solutions for the Atomic Number and Absorption Corrections.- 10. Compositional Imaging.- 10.1. Introduction.- 10.2. Analog X-Ray Area Scanning (Dot Mapping).- 10.3. Digital Compositional Mapping..- 11. Specimen Preparation for Inorganic Materials: Microstructural and Microchemical Analysis.- 11.1. Metals.- 11.2. Ceramics and Geological Specimens.- 11.3. Electronic Devices and Packages.- 11.4. Semiconductors.- 11.5. Sands, Soils, and Clays.- 11.6. Particles and Fibers.- 12. Sample Preparation for Biological, Organic, Polymeric, and Hydrated Materials.- 12.1. Introduction.- 12.2. Compromising the Electron-Beam Instrument.- 12.3. Compromising the Sample.- 12.4. Correlative Microscopy.- 12.5. Techniques for Structural Studies.- 12.6. Specimen Preparation for Localization of Metabolic Activity and Chemical Specificity.- 12.7 Preparative Procedures for Organic Samples Such as Polymers, Plastics, and Paints.- 12.8. Low-Temperature Specimen Preparation for Structural and Analytical Studies.- 12.9. Damage, Artifact, and Interpretation.- 12.10. Specific Preparative Procedures: A Bibliography.- 13. Coating and Conductivity Techniques for SEM and Microanalysis.- 13.1. Introduction.- 13.2. Specimen Characteristics.- 13.3. Untreated Specimens.- 13.4.Bulk Conductivity Staining Methods.- 13.5. Specimen Mounting Procedures.- 13.6. Thin-Film Methods.- 13.7. Thermal Evaporation.- 13.8. Sputter Coating.- 13.9. Specialized Coating Methods.- 13.10. Determination of Coating Thickness.- 13.11. Artifacts Related to Coating and Bulk-Conductivity Procedures.- 13.12. Conclusions.- 14 Data Base.- Table 14.1. Atomic Number, Atomic Weight, and Density of Elements.- Table 14.2. Common Oxides of the Elements.- Table 14.3. Mass Absorption Coefficients for ? Lines.- Table 14.4. Mass Absorption Coefficients for ? Lines.- Table 14.5. Mass Absorption Coefficients for ? Lines.- Table 14.6. K Series X-Ray Wavelengths and Energies.- Table 14.7. L Series X-Ray Wavelengths and Energies !.- Table 14.8. M Series X-Ray Wavelengths and Energies.- Table 14.9. J and Fluorescent Yield (?) by Atomic Number.- Table 14.10. Important Properties of Selected Coating Elements.- References.

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From a review of the first edition:
`The emphasis throughout has been on practical aspects ... that approach, plus the comprehensiveness of the material covered, makes this a valuable, virtually indispensible, reference work.'
Microscope Journal